Contact Information

Matthew Copel
nanoscale analysis of electronic materials
Thomas J. Watson Research Center, Yorktown Heights, NY USA
mcopelatus.ibm.com      +1dash914dash945dash2907


Tab navigation

Research Interests

  • Electronic Materials. Metal-oxide alternative gate dielectrics, ferroelectric/metal interfaces, silicon oxynitride layered dielectrics, group IV epitaxy, surface chemistry and processing.
  • Surface Science. Structure of ferroelectric and semiconductor surfaces and their influence on thin film growth properties.
  • Ion Beam Analysis. High resolution techniques and development of novel detection schemes for medium energy ions.

Recent Professional Activities

  • APS Committee on Membership (2011-2013).
  • MRS New Publication Products Subcommittee (2011-2013).
  • Chair, IBM Materials Research Community (2010).
  • General Chair, IEEE Semiconductor Interface Specialists Conference (2007).
  • Co-Chair International Workshop on High Resolution Depth Profiling (2005).
  • Editorial Board, Journal of Vacuum Science and Technology A (2005-2007).