Interconnect dielectrics       

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 photoNICHOLAS FULLER photo Stephen M. Gates photo Alfred Grill photoERIC A. JOSEPH photo Sung K. Kang photo Qinghuang Lin photo Hiroyuki  (Hiro) Miyazoe photoSpike Narayan photo

Interconnect dielectrics - overview


Development of low-k and ultralow-k ILD dielectrics for the BEOL

Development of Cu diffusion caps for the BEOL

Alternative ULK integration schemes for plasma protection