Dielectric Materials Research for Advanced Microelectronic Devices Publications



2013

Nanoporous Media with Lamellar Structures
J.N. Cha, G.J.M. Dubois, J.L. Hedrick, H.C. Kim, V.Y.W. Lee, T.P. Magbitang, R.D. Miller, W. Volksen
US Patent 8,389,589

Homogeneous Porous Low Dielectric Constant Materials
Robert L. Bruce, Geraud Jean-Michel Dubois, Theo J. Frot, Teddie P. Magbitang, Sampath Purushothaman, David L. Rath, Willi Volksen
US Patent 8,492,239


2012

Moisture-Insensitive Polycarbosilane Films with Superior Mechanical Properties
Y. Matsuda, JS Rathore, LV Interrante, RH Dauskardt, G. Dubois
ACS Applied Materials & Interfaces 4(5), 2659-2663, American Chemical Society, 2012

Low-k Materials: Recent Advances
G. Dubois, W. Volksen
Advanced Interconnects for ULSI Technology, 1--33, Wiley Online Library, 2012

Post Porosity Plasma Protection: Scaling of Efficiency with Porosity
Theo Frot, Willi Volksen, Sampath Purushothaman, Robert L. Bruce, Teddie Magbitang, Dolores C. Miller, Vaughn R. Deline, Geraud Dubois
Advanced Functional Materials 22(14), 3043-3050, 2012


2011


POLY-OXYCARBOSILANE COMPOSITIONS FOR USE IN IMPRINT LITHOGRAPHY
R.A. Dipietro, G.J.M. Dubois, R.D. Miller, R. Sooriyakumaran
US Patent App. 13/026,168

Planar Collimated Illumination System Using Nano-Hybrid Low Index Materials
Y. Taira, H. Numata, G. Dubois, W. Volksen
Frontiers in Optics, 2011

Precursors for porous low-dielectric constant materials for use in electronic devices
C.J. Hawker, J.L. Hedrick, R.D. Miller, W. Volksen
US Patent 7,892,635

Method of step-and-flash imprint lithography
R.A. Dipietro, G.J.M. Dubois, R.D. Miller, R. Sooriyakumaran
US Patent 7,927,664

Photopatternable dielectric materials for BEOL applications and methods for use
R.D. Allen, P.J. Brock, B.W. Davis, G.J.M. Dubois, Q. Lin, R.D. Miller, A. Nelson, S. Purushothaman, R. Sooriyakumaran, others
US Patent 7,919,225

Future of PECVD and spin-on ultra low-k materials
W Volksen, T Frot, T Magbitang, S Gates, Mark Oliver, R Dauskardt, G Dubois
Interconnect Technology Conference and 2011 Materials for Advanced Metallization (IITC/MAM), 2011 IEEE International, pp. 1--3

Post Porosity Plasma Protection a new approach to integrate k≤ 2.2 porous ULK materials
T. Frot, W. Volksen, T. Magbitang, D. Miller, S. Purushothaman, M. Lofaro, R. Bruce, G. Dubois
Interconnect Technology Conference and 2011 Materials for Advanced Metallization (IITC/MAM), 2011 IEEE International, pp. 1--3

A Manufacturing Grade, Porous Oxycarbosilane Spin-On Dielectric Candidate with K≤ 2.0
W. Volksen, T.P. Magbitang, R.D. Miller, S. Purushothaman, S.A. Cohen, H. Nakagawa, Y. Nobe, T. Kokubo, G.J.M. Dubois
Journal of the Electrochemical Society158, G155, 2011

Application of the Protection/Deprotection Strategy to the Science of Porous Materials
Theo Frot, Willi Volksen, Sampath Purushothaman, Robert Bruce, Geraud Dubois
Advanced Materials 23(25), 2828-+, 2011

Cryogenic plasmas for controlled processing of nanoporous materials
F. Iacopi, J.H. Choi, K. Terashima, P.M. Rice, G. Dubois
Physical Chemistry Chemical Physics 13(9), 3634--3637, Royal Society of Chemistry, 2011


2010


Low-K interlevel dielectric materials and method of forming low-K interlevel dielectric layers and structures
G.J.M. Dubois, J.L. Hedrick, H.C. Kim, V.Y.W. Lee, T.P. Magbitang, R.D. Miller, M. Sankarapandian, L.K. Sundberg, W. Volksen, others
US Patent 7,820,242

Molecular design of ultra-low-k hybrid glasses
M. Oliver, G. Dubois, R. Dauskardt
Interconnect Technology Conference (IITC), 2010 International, pp. 1--3

Low dielectric constant materials
W. Volksen, R.D. Miller, G. Dubois
Chemical reviews 110(1), 56, 2010

Molecular origins of the mechanical behavior of hybrid glasses
M.S. Oliver, G. Dubois, M. Sherwood, D.M. Gage, R.H. Dauskardt
Advanced Functional Materials 20(17), 2884--2892, Wiley Online Library, 2010


2009

Methods to mitigate plasma damage in organosilicate dielectrics
John C. Arnold, Griselda Bonilla, William J. Cote, Geraud Dubois, Daniel C. Edelstein, Alfred Grill, Elbert Huang, Robert D. Miller, Satya V. Nitta, Sampath Purushothaman, E. Todd Ryan, Muthumanickam Sankarapandian, Terry A. Spooner, Willi Volksen
US Patent 8,470,706

Adjusting the skeleton and pore structure of porous SiCOH dielectrics
SM Gates, G. Dubois, ET Ryan, A. Grill, M. Liu, D. Gidley
Journal of the Electrochemical Society156, G156, 2009


2008

POROUS COMPOSITION OF MATTER, AND METHOD OF MAKING SAME
E. Connor, J.P. Godschalx, C.J. Hawker, J.L. Hedrick, V.Y.W. Lee, T.P. Magbitang, R.D. Miller, Q.J. Niu, W. Volksen, others
US Patent App. 12/035,047

Materials having predefined morphologies and methods of formation thereof
J.N. Cha, J.L. Hedrick, H.C. Kim, R.D. Miller, W. Volksen, others
US Patent 7,341,788

Effect of Porogen Molecular Architecture and Loading on Structure of Porous Thin Films
H.J. Lee, C.L. Soles, B.D. Vogt, D.W. Liu, W. Wu, E.K. Lin, H.C. Kim, V.Y. Lee, W. Volksen, R.D. Miller
Chemistry of Materials 20(24), 7390--7398, ACS Publications, 2008

Supercritical CO< sub> 2/co-solvent extraction of porogens and surfactant templates to obtain ultralow dielectric constant films
AA Lubguban, JA Lubguban, MT Othman, RV Shende, S. Gangopadhyay, RD Miller, W. Volksen, H.C. Kim
Thin Solid Films 516(15), 4733--4741, Elsevier, 2008

Imprint process using polyhedral oligomeric silsesquioxane based imprint materials
R.D. Allen, R.A. DiPietro, G.J.M. Dubois, M.W. Hart, R.D. Miller, R. Sooriyakumaran, others
US Patent 7,468,330

Mechanical enhancement of low-k organosilicates by laser spike annealing
W. Volksen, G. Dubois, A. Kellock, T.P. Magbitang, R.D. Miller, D. Miller, S. Cohen, E.E. Simonyi, L. Ramirez, D. Markle, others
Journal of the Electrochemical Society155, G224, 2008

Molecular-Controlled Fracture and Release of Templated Nanoporous Organosilicate Thin Films
M.D. Ong, W. Volksen, G. Dubois, V. Lee, P.J. Brock, V.R. Deline, R.D. Miller, R.H. Dauskardt
Advanced Materials 20(16), 3159--3164, Wiley Online Library, 2008

Superior mechanical properties of dense and porous organic/inorganic hybrid thin films
G. Dubois, W. Volksen, T. Magbitang, M.H. Sherwood, R.D. Miller, D.M. Gage, R.H. Dauskardt
Journal of Sol-Gel Science and Technology 48(1), 187--193, Springer, 2008

Ultra Low-k Films Derived from Hyperbranched Polycarbosilanes (HBPCS)
J.S. Rathore, L.V. Interrante, G. Dubois
Advanced Functional Materials 18(24), 4022--4028, Wiley Online Library, 2008

Organic Thin Film Transistor Using a Photo-Curable Organic/Inorganic Hybrid Material as a Gate Dielectric
D.H. Hwang, Y.S. Yang, J.I. Lee, S.H. Kim, O.H. Park, H.C. Kim, V. Lee, G. Dubois, R.D. Miller
Journal of Nanoscience and Nanotechnology 8(9), 4561--4564, American Scientific Publishers, 2008


2007

Dielectric Films for Advanced Microelectronics
G. Dubois, RD Miller, W. Volksen, MR Baklanov, M. Green, K. Maex
2007 - Wiley New York, Wiley New York

MATERIALS FOR SELECTIVE TRAPPING OF CARBON MONOXIDE
F. Jerome, G. Dubois, S. Brandes, G. Canard, J. Barbe, R. Guilard, B. Roux-fouillet, H. Ledon
EP Patent 1,414,823

Microelectronic Materials with Hierarchical Organization
G. Dubois, RD Miller, J.L. Hedrick
Macromolecular Engineering, 2331--2367, Wiley Online Library, 2007

Spin‐on Dielectric Materials
G. Dubois, R.D. Miller, W. Volksen
Dielectric films for advanced microelectronics, 33--83, Wiley Online Library, 2007

Molecular network reinforcement of sol--gel glasses
G. Dubois, W. Volksen, T. Magbitang, R.D. Miller, D.M. Gage, R.H. Dauskardt
Advanced Materials 19(22), 3989--3994, Wiley Online Library, 2007


2006


Direct photo-patterning of nanoporous organosilicates, and method of use
R.D. Miller, H.C. Kim, E. Connor, V.Y.W. Lee, G.M. Wallraff, W. Volksen, others
US Patent 7,056,840

Characterization of porous low-k films using variable angle spectroscopic ellipsometry
MT Othman, JA Lubguban, A.A. Lubguban, S. Gangopadhyay, RD Miller, W. Volksen, H.C. Kim
Journal of applied physics99, 083503, 2006

Methods to form SiCOH or SiCNH dielectrics and structures including the same
G. Dubois, S.M. Gates, A. Grill, V.Y. Lee, R.D. Miller, S. Nguyen, V. Patel
US Patent App. 11/481,019

Analysis of Plasma-Induced Modification of ULK and eULK Materials: Dual Damascene Processing Challenges for 45nm (K⩽ 2.4) and Beyond BEOL Technologies
NCM Fuller, MA Worsley, S Nitta, T Dalton, TL Tai, S Bent, T Magbitang, G Dubois, R Miller, W Volksen, others
Interconnect Technology Conference, 2006 International, pp. 24--26

Laser spike annealing: a novel post-porosity treatment for significant toughening of low-k organosilicates
W. Volksen, G. Dubois, A. Kellock, T.P. Magbitang, R.D. Miller, S. Cohen, E.E. Simonyi, L. Ramirez, Y. Wang
Interconnect Technology Conference, 2006 International, pp. 146--148

Porous organosilicates with improved mechanical properties
Geraud Dubois, James L. Hedrick, Ho-Cheol Kim, Victor Y. Lee, Teddie P. Magbitang, Robert D. Miller, Eva E. Simonyi, Willi Volksen

Imaging thin films of nanoporous low-k dielectrics: comparison between ultramicrotomy and focused ion beam preparations for transmission electron microscopy
Leslie E Thompson, Philip M Rice, Eugene Delenia, Victor Y Lee, Phillip J Brock, Teddie P Magbitang, Geraud Dubois, Willi Volksen, Robert D Miller, Ho-Cheol Kim
Microscopy and Microanalysis 12(02), 156--159, Cambridge Univ Press, 2006

Application of Solvent-Directed Assembly of Block Copolymers to the Synthesis of Nanostructured Materials with Low Dielectric Constants
T.M. Hermans, J. Choi, B.G.G. Lohmeijer, G. Dubois, R.C. Pratt, H.C. Kim, R.M. Waymouth, J.L. Hedrick
Angewandte Chemie International Edition 45(40), 6648--6652, Wiley Online Library, 2006

Monolayered organosilicate toroids and related structures: A phase diagram for templating from block copolymers
J. Choi, T.M. Hermans, B.G.G. Lohmeijer, R.C. Pratt, G. Dubois, J. Frommer, R.M. Waymouth, J.L. Hedrick
Nano letters 6(8), 1761--1764, ACS Publications, 2006

Organocatalytic Living Ring-Opening Polymerization of Cyclic Carbosiloxanes
Lohmeijer, Bas G. G.; Dubois, Geraud; Leibfarth, Frank; Pratt, Russell C.; Nederberg, Fredrik; Nelson, Alshakim; Waymouth, Robert M.; Wade, Charles; Hedrick, James L.
Org. Lett. 8(21), 4683, ACS Publications, 2006

Nanoporous media templated from unsymmetrical amphiphilic porogens
Jennifer Nam Cha, Geraud Jean-Michel Dubois, James Lupton Hedrick, Ho-Cheol Kim, Victor Yee-Way Lee, Teddie Peregrino Magbitang, Robert Dennis Miller, Willi Volksen


2005

Effect of plasma interactions with low-k films as a function of porosity, plasma chemistry, and temperature
M A Worsley, S F Bent, S M Gates, N C M Fuller, W Volksen, M Steen, T Dalton
Journal of Vacuum Science \& Technology B: Microelectronics and Nanometer Structures23, 395, 2005

New spin-on oxycarbosilane low-k dielectric materials with exceptional mechanical properties
D. Geraud, T. Magbitang, W. Volksen, EE Simonyi, RD Miller
Interconnect Technology Conference, 2005. Proceedings of the IEEE 2005 International, pp. 226--228

Detection of open or closed porosity in low-< i> $\kappa$ dielectrics by solvent diffusion
M.A. Worsley, M. Roberts, S.F. Bent, S.M. Gates, T. Shaw, W. Volksen, R. Miller
Microelectronic engineering 82(2), 113--118, Elsevier, 2005

Phase separation behavior of poly (methyl methacrylate-co-dimethylaminoethyl methacrylate)/methyl silsesquioxane hybrid nanocomposites studied by dansyl fluorescence
QR Huang, C.W. Frank, D. Mecerreyes, W. Volksen, R.D. Miller
Chemistry of materials 17(6), 1521--1528, ACS Publications, 2005

Oriented Nanoporous Lamellar Organosilicates Templated from Topologically Unsymmetrical Dendritic‐Linear Block Copolymers
T. Magbitang, V.Y. Lee, J.N. Cha, H.L. Wang, W.R. Chung, R.D. Miller, G. Dubois, W. Volksen, H.C. Kim, J.L. Hedrick
Angewandte Chemie International Edition 44(46), 7574--7580, Wiley Online Library, 2005


2004

Radiation effects on porous low-k dielectric materials
Z. Jenei, P. Asoka-Kumar, MP Petkov, RD Miller, W. Volksen
APS Meeting Abstracts, pp. 21002, 2004

Supercritical CO2 Treatments for Semiconductor Applications
S. Gangopadhyay, JA Lubguban, B. Lahlouh, G. Sivaraman, K. Biswasa, T. Rajagopalan, N. Biswas, HC Kim, W. Volksen, RD Miller
Mat. Res. Soc. Symp. Proc, pp. F4, 2004

Defect-free dielectric coatings and preparation thereof using polymeric nitrogenous porogens
C.J. Hawker, J.L. Hedrick, E.E. Huang, V.Y.W. Lee, T. Magbitang, D. Mecerreyes, R.D. Miller, W. Volksen, others
US Patent 6,812,551

Porous Low-k Dielectrics: Material Properties
C. Tyberg, E. Huang, J. Hedrick, E. Simonyi, S. Gates, S. Cohen, K. Malone, H. Wickland, M. Sankarapandian, M. Toney, others
ACS SYMPOSIUM SERIES, pp. 161--172, An American Chemical Society Publication, 2004

ToF-SIMS studies of nanoporous PMSSQ materials: kinetics and reactions in the processing of low-K dielectrics for ULSI applications
P. Lazzeri, GW Rubloff, L. Vanzetti, RM Briber, M. Anderle, M. Bersani, JJ Park, H.C. Kim, W. Volksen, RD Miller, others
Surface and interface analysis 36(4), 304--310, Wiley Online Library, 2004

Toughening of nanoporous glasses using porogen residuals
D.A. Maidenberg, W. Volksen, R.D. Miller, R.H. Dauskardt
Nature materials 3(7), 464--469, Nature Publishing Group, 2004

Successful dual damascene integration of extreme low k materials (k< 2.0) using a novel gap fill based integration scheme
S Nitta, S Purushothaman, S Smith, M Krishnan, D Canaperi, T Dalton, W Volksen, RD Miller, B Herbst, C-K Hu, others
Electron Devices Meeting, 2004. IEDM Technical Digest. IEEE International, pp. 321--324

Photopatterned nanoporous media
H.C. Kim, G. Wallraff, C.R. Kreller, S. Angelos, V.Y. Lee, W. Volksen, R.D. Miller
Nano letters 4(7), 1169--1174, ACS Publications, 2004

Pore morphologies in disordered nanoporous thin films
J.A. Hedstrom, M.F. Toney, E. Huang, H.C. Kim, W. Volksen, T. Magbitang, R.D. Miller
Langmuir 20(5), 1535--1538, ACS Publications, 2004

Patterned nanoporous poly (methylsilsesquioxane) thin films: a potential high density substrate
Z.L. Hogan, C.R. Kreller, K.A. Tran, M.W. Hart, G.M. Wallraff, S.A. Swanson, W. Volksen, V.Y. Lee, T.P. Magbitang, J.L. Hedrick, others
Materials Science and Engineering: C 24(4), 487--490, Elsevier, 2004

Templating Organosilicate Vitrification using Unimolecular Self Organizing Polymers: Evolution of Morphology and Nanoporosity Development with Network Formation
H.C. Kim, T. Magbitang, V.Y. Lee, R.D. Miller, M.F. Toney, Z. Lin, R. Briber, J.L. Hedrick
2004 - www-spires.slac.stanford.edu, United States. Department of Energy. Office of Science

Nanoporous, low-dielectric constant organosilicate materials derived from inorganic polymer blends
RD Miller, W Volksen, VY Lee, E Connor, T Magbitang, R Zafran, L Sundberg, CJ Hawker, JL Hedrick, E Huang, others
ACS SYMPOSIUM SERIES, pp. 144--160, 2004

Templating Organosilicate Vitrification Using Unimolecular Self-Organizing Polymers Prepared from Tandem Ring Opening and Atom Transfer Radical Polymerizations
T. Magbitang, VY Lee, EF Connor, LK Sundberg, H.C. Kim, W. Volksen, CJ Hawker, RD Miller, JL Hedrick
Macromolecular Symposia, pp. 295--306, 2004

Supercritical CO2 extraction of porogen phase: An alternative route to nanoporous dielectrics
JA Lubguban, S. Gangopadhyay, B. Lahlouh, T. Rajagopalan, N. Biswas, J. Sun, DH Huang, SL Simon, A. Mallikarjunan, HC Kim, others
Journal of materials research 19(11), 3224--3233, Cambridge Univ Press, 2004

A buckling-based metrology for measuring the elastic moduli of polymeric thin films
C.M. Stafford, C. Harrison, K.L. Beers, A. Karim, E.J. Amis, M.R. Vanlandingham, H.C. Kim, W. Volksen, R.D. Miller, E.E. Simonyi
Nature materials 3(8), 545--550, Nature Publishing Group, 2004

Porous organosilicates low-dielectric films for high-frequency devices
A. Knoesen, G. Song, W. Volksen, E. Huang, T. Magbitang, L. Sundberg, J.L. Hedrick, C.J. Hawker, R.D. Miller
Journal of electronic materials 33(2), 135--140, Springer, 2004

First Example of a Nanoporous High-Temperature Polymer Thermoset: Eluding Transition--Time--Temperature Constraints Associated with Organic Thermosets
E.F. Connor, V.Y. Lee, T. Magbitang, C.J. Hawker, W. Volksen, R. Siemens, R.A. DiPietro, J.C. Hedrick, H.C. Kim, R.D. Miller, others
Advanced Materials 16(17), 1525--1529, Wiley Online Library, 2004


2003

Titelbild: Templating of Silsesquioxane Cross-Linking Using Unimolecular Self-Organizing Polymers (Angew. Chem. 32/2003)
E.F. Connor, L.K. Sundberg, H.C. Kim, J.J. Cornelissen, T. Magbitang, P.M. Rice, V.Y. Lee, C.J. Hawker, W. Volksen, J.L. Hedrick, others
Angewandte Chemie 115(32), 3831--3831, Wiley Online Library, 2003

Porous dielectric material and electronic devices fabricated therewith
C.J. Hawker, J.L. Hedrick, R.D. Miller, W. Volksen
US Patent 6,541,865

Effects of templating byproducts on adhesion of nanoporous dielectric films
D. Maidenberg, W. Volksen, R. Miller, R. Dauskardt
Interconnect Technology Conference, 2003. Proceedings of the IEEE 2003 International, pp. 48--50

Construction of Representative Pore Morphologies in Disordered Nanoporous Two-Phase Materials
J.A. Hedstrom, M.F. Toney, E. Huang, H.C. Kim, W. Volksen, T. Magbitang, R.D. Miller
2003 - slac.stanford.edu

Electron Radiation Effects in Low-K Dielectric Materials
Z. Jenei, MP Petkov, P. Asoka-Kumar, RD Miller, W. Volksen
Technical Report, Lawrence Livermore National Lab., CA (US), 2003

Neutron Reflectivity Study on Nanoporous Poly (methylsilsesquioxane) Thin Film
Z. Lin, S. Ahn, R.M. Briber, H.C. Kim, W. Volksen, R.D. Miller, K. Shin
APS Meeting Abstracts, pp. 25010, 2003

Creating nanoporosity by selective extraction of porogens using supercritical carbon dioxide/cosolvent processes
B. Lahlouh, T. Rajagopalan, JA Lubguban, N. Biswas, S. Gangopadhyaya, J. Sun, D. Huang, SL Simon, HC Kim, W. Volksen, others
MRS Proceedings, 2003

Versatile synthesis of nanometer sized hollow silica spheres
J.J.L.M. Cornelissen, E.F. Connor, H.C. Kim, V.Y. Lee, T. Magibitang, P.M. Rice, W. Volksen, L.K. Sundberg, R.D. Miller
Chemical Communications 45(8), 1010--1011, Royal Society of Chemistry, 2003

Neutron reflectivity on nanoporous poly (methylsilsesquioxane) thin films
H.C. Kim, W. Volksen, R.D. Miller, E. Huang, G. Yang, R.M. Briber, K. Shin, S.K. Satija
Chemistry of materials 15(3), 609--611, ACS Publications, 2003

Cover Picture: Templating of Silsesquioxane Cross-Linking Using Unimolecular Self-Organizing Polymers (Angew. Chem. Int. Ed. 32/2003)
E.F. Connor, L.K. Sundberg, H.C. Kim, J.J. Cornelissen, T. Magbitang, P.M. Rice, V.Y. Lee, C.J. Hawker, W. Volksen, J.L. Hedrick, others
Angewandte Chemie International Edition 42(32), 3703--3703, Wiley Online Library, 2003

Miscibility in organic/inorganic hybrid nanocomposites suitable for microelectronic applications: Comparison of modulated differential scanning calorimetry and fluorescence spectroscopy
QR Huang, H.C. Kim, E. Huang, D. Mecerreyes, J.L. Hedrick, W. Volksen, C.W. Frank, R.D. Miller
Macromolecules 36(20), 7661--7671, ACS Publications, 2003

Supercritical carbon dioxide extraction of porogens for the preparation of ultralow-dielectric-constant films
T. Rajagopalan, B. Lahlouh, JA Lubguban, N. Biswas, S. Gangopadhyay, J. Sun, DH Huang, SL Simon, A. Mallikarjunan, H.C. Kim, others
Applied physics letters 82(24), 4328--4330, AIP, 2003

Templating of Silsesquioxane Cross‐Linking Using Unimolecular Self‐Organizing Polymers
E.F. Connor, L.K. Sundberg, H.C. Kim, J.J. Cornelissen, T. Magbitang, P.M. Rice, V.Y. Lee, C.J. Hawker, W. Volksen, J.L. Hedrick, others
Angewandte Chemie 115(32), 3915--3918, Wiley Online Library, 2003


2002

ChemInform Abstract: Application of Complex Macromolecular Architectures for Advanced Microelectronic Materials
J.L. Hedrick, T. Magbitang, E.F. Connor, T. Glauser, W. Volksen, C.J. Hawker, V.Y. Lee, R.D. Miller
ChemInform 33(49), no--no, Wiley Online Library, 2002

Electronic devices with dielectric compositions and method for their manufacture
C.J. Hawker, J.L. Hedrick, R.D. Miller, W. Volksen, others
US Patent 6,342,454

Structural Characterization of Nanoporous Pmssq Thin Films
RM Briber, GY Yang, E. Huang, HC Kim, PM Rice, W. Volksen, RD Miller, K. Shin
APS Meeting Abstracts, pp. 11013, 2002

Nanoporous PMSSQ Films: NR and QCM study on sorption selectivity
H.C. Kim, W. Hinsberg, W. Volksen, T. Magbitang, V. Lee, J. Hedrick, CJ Hawker, RD Miller, E. Huang, JB Wilds, others
APS Meeting Abstracts, pp. 11014, 2002

Pyrene Fluorescence as a Molecular Probe of Miscibility in Organic/Inorganic Hybrid Nanocomposites Suitable for Microelectronic Applications
QR Huang, D. Mecerreyes, J.L. Hedrick, W. Volksen, C.W. Frank, R.D. Miller
MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS, pp. 211--216, 2002

Selective sorption of nanoporous poly (methyl silsesquioxane)
H.C. Kim, B. Jason, W.D. Hinsberg, L.R. Johnson, W. Volksen, T. Magbitang, V.Y. Lee, J.L. Hedrick, C.J. Hawker, R.D. Miller, others
Chemistry of materials 14(11), 4628--4632, ACS Publications, 2002

Porosity effect on the dielectric constant and thermomechanical properties of organosilicate films
J. Liu, D. Gan, C. Hu, M. Kiene, P.S. Ho, W. Volksen, R.D. Miller
Applied physics letters81, 4180, 2002

Structure and interaction of organic/inorganic hybrid nanocomposites for microelectronic applications. 1. MSSQ/P (MMA-co-DMAEMA) nanocomposites
QR Huang, W. Volksen, E. Huang, M. Toney, C.W. Frank, R.D. Miller
Chemistry of materials 14(9), 3676--3685, ACS Publications, 2002

Fabrication of multilayered nanoporous poly (methyl silsesquioxane)
H.C. Kim, J.B. Wilds, C.R. Kreller, W. Volksen, P.J. Brock, V.Y. Lee, T. Magbitang, J.L. Hedrick, C.J. Hawker, R.D. Miller
Advanced Materials 14(22), 1637--1639, 2002

Cover Picture: Chem. Eur. J. 15/2002
J.L. Hedrick, T. Magbitang, E.F. Connor, T. Glauser, W. Volksen, C.J. Hawker, V.Y. Lee, R.D. Miller
Chemistry-A European Journal 8(15), 3287--3287, Wiley Online Library, 2002

Pore size distributions in nanoporous methyl silsesquioxane films as determined by small angle X-ray scattering
E. Huang, MF Toney, W. Volksen, D. Mecerreyes, P. Brock, H.C. Kim, CJ Hawker, JL Hedrick, VY Lee, T. Magbitang, others
Applied physics letters 81(12), 2232--2234, AIP, 2002

Application of complex macromolecular architectures for advanced microelectronic materials
J.L. Hedrick, T. Magbitang, E.F. Connor, T. Glauser, W. Volksen, C.J. Hawker, V.Y. Lee, R.D. Miller
Chemistry-A European Journal 8(15), 3308--3319, Wiley Online Library, 2002


2001

Process for manufacture of integrated circuit device
K.R. Carter, R.F. Cook, M.A. Harbison, C.J. Hawker, J.L. Hedrick, V.Y.W. Lee, E.G. Liniger, R.D. Miller, W. Volksen, others
US Patent 6,177,360

Star polymers with alternating arms from miktofunctional $\mu$-initiators using consecutive atom transfer radical polymerization and ring-opening polymerization
A. Heise, M. Trollsaas, T. Magbitang, J.L. Hedrick, C.W. Frank, R.D. Miller
Macromolecules 34(9), 2798--2804, ACS Publications, 2001

Process for manufacture of integrated circuit device using inorganic/organic matrix comprising polymers of three dimensional architecture
K.R. Carter, R.A. Dipietro, C.J. Hawker, J.L. Hedrick, V.Y.W. Lee, R.D. Miller, W. Volksen, others
US Patent 6,333,141

Current and potential uses of positron beams to study porosity in low-k dielectric thin films
KP Rodbell, MP Petkov, M.H. Weber, K.G. Lynn, W. Volksen, R.D. Miller
Materials Science Forum, pp. 15--19, 2001

Opportunities and challenges in ultra low k dielectrics for interconnect applications
S Nitta Purushothaman, SV Ryan, JG Narayan, C Krishnan, M Cohen, S Whiteha S Gates
2001 - lw20.com

A Novel Approach to Functionalized Nanoparticles: Self‐Crosslinking of Macromolecules in Ultradilute Solution
D. Mecerreyes, V. Lee, C.J. Hawker, J.L. Hedrick, A. Wursch, W. Volksen, T. Magbitang, E. Huang, R.D. Miller
Advanced Materials 13(3), 204--208, Wiley Online Library, 2001

Application of hyperbranched block copolymers as templates for the generation of nanoporous organosilicates
D. Mecerreyes, E. Huang, T. Magbitang, W. Volksen, CJ Hawker, VY Lee, RD Miller, JL Hedrick
High Performance Polymers 13(2), S11--S19, SAGE Publications, 2001


2000

Process for manufacture of integrated circuit device using a matrix comprising porous high temperature thermosets
K.R. Carter, D.J. Dawson, C.J. Hawker, J.L. Hedrick, J.C. Hedrick, V.Y.W. Lee, R.D. Miller, W. Volksen, others
US Patent 6,093,636

Dielectric compositions and method for their manufacture
C.J. Hawker, J.L. Hedrick, R.D. Miller, W. Volksen
US Patent 6,107,357

Morphology of Nanoporous Ultralow Dielectric Materials
S. Choi, R.M. Briber, E. Huang, W. Volksen, R. Miller
APS Meeting Abstracts, pp. 23011, 2000

STRUCTURE-PROPERTY RELATIONSHIPS FOR NANO-POROUS POLY (METHYL-SILSESQUIOXANE) FILMS WITH LOW-DIELECTRIC CONSTANTS PREPARED VIA ORGANIC/INORGANIC POLYMER HYBRIDS
C.V. Nguyen, C.J. Hawker, J.L. Hedrick, R.L. Jaffe, R.D. Miller, J.F. Remenar, H.W. Rhee, M.F. Toney, M. Trollsas, W. Volksen, others
Low and high dielectric constant materials: materials science, processing, and reliability issues: proceedings of the fourth international symposium: and, thin film materials for advanced packaging technologies: proceedings of the second international sym, pp. 38, 2000

Supramolecular approaches to nanoscale dielectric foams for advanced microelectronic devices
C.J. Hawker, J.L. Hedrick, R.D. Miller, W. Volksen
MRS Bulletin 25(04), 54--58, Cambridge Univ Press, 2000


1999

Nanoporous polyimides
J. Hedrick, K. Carter, J. Labadie, R. Miller, W. Volksen, C. Hawker, D. Yoon, T. Russell, J. McGrath, R. Briber
Progress in Polyimide Chemistry II, 1--43, Springer, 1999

Porous organosilicates for on-chip dielectric applications
RD Miller, R. Beyers, KR Carter, RF Cook, M. Harbison, CJ Hawker, JL Hedrick, V. Lee, E. Liniger, C. Nguyen, others
MRS Proceedings, 1999


1998

Templating Nanoporosity in Thin-Film Dielectric Insulators
J.L. Hedrick, R.D. Miller, C.J. Hawker, K.R. Carter, W. Volksen, D.Y. Yoon, M. Trollsaas
Advanced Materials 10(13), 1049--1053, Wiley Online Library, 1998


1997

Imide—Dimethylsiloxane block copolymers: Design and synthesis of a permanent buried oxygen ion etch barrier
W. Volksen, JL Hedrick, TP Russell, S. Swanson
Journal of applied polymer science 66(1), 199--208, Wiley Online Library, 1997

Crosslinked polyimide foams derived from poly (imidepropylene oxide) copolymers
JL Hedrick, K. Carter, M. Sanchez, R. Di Pietro, S. Swanson, S. Jayaraman, JG McGrath
Macromolecular Chemistry and Physics 198(2), 549--559, Wiley Online Library, 1997