BEOL Reliability Study       

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 Peilin Song photo Ernest Y. (Ernest Y) Wu photo

BEOL Reliability Study - Publications/Patents


  • A Novel Integrated Reliability Test System for BEOL TDDB Study J. Chen, P. Song, T. Shaw, F. Stellari, L. Gignac, C. Breslin, D. Pfeiffer, and G. Bonila Proc. of International Symposium for Testing and Failure Analysis (ISTFA), 2012
  • INTEGRATED TIME DEPENDENT DIELECTRIC BREAKDOWN RELIABILITY TESTING, J. Chen, P. Song, T. Shaw, F. Stellari, D. Pfeiffer, 07/09/2012 Filed as Docket YOR920120332US2 in US