Alfred Grill  Alfred Grill photo       

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IBM Fellow
Thomas J. Watson Research Center, Yorktown Heights, NY USA
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Professional Associations

Professional Associations:  Materials Research Society (MRS)  |  National Academy of Engineering


2012

CONTINUOUS METAL SEMICONDUCTOR ALLOY VIA FOR INTERCONNECTS
G. Cohen, C.D. Dimitrakopoulos, A. Grill
US Patent App. 13/405,598


2010

Embedded nano UV blocking and diffusion barrier for improved reliability of copper/ultra low K interlevel dielectric electronic devices
Griselda Bonilla, Christos D Dimitrakopoulos, Alfred Grill, Son V Nguyen, Satyanarayana V Nitta, Darryl D Restaino, Terry A Spooner
US Patent 7,749,892


2009

Methods to mitigate plasma damage in organosilicate dielectrics
John C. Arnold, Griselda Bonilla, William J. Cote, Geraud Dubois, Daniel C. Edelstein, Alfred Grill, Elbert Huang, Robert D. Miller, Satya V. Nitta, Sampath Purushothaman, E. Todd Ryan, Muthumanickam Sankarapandian, Terry A. Spooner, Willi Volksen
US Patent 8,470,706

ULTRALOW DIELECTRIC CONSTANT LAYER WITH CONTROLLED BIAXIAL STRESS
C.D. Dimitrakopoulos, S.M.C. Gates, A. Grill, M.W. Lane, E.G. Liniger, X.H. Liu, S. Van Nguyen, D.A. Neumayer, T.M.C. Shaw
US Patent App. 12/542,287

Multilayer interconnect structure containing air gaps and method for making
Christopher V Jahnes, Satyanarayana V Nitta, Kevin S Petrarca, Katherine L Saenger
US Patent 7,534,696


2007


Low K and ultra low K SiCOH dielectric films and methods to form the same
S.M. Gates, C.D. Dimitrakopoulos, A. Grill, S. Van Nguyen, others
US Patent 7,282,458

Ultra low K (ULK) SiCOH film and method
S M C Gates, A Grill, others
US Patent 7,288,292


2006


Methods to form SiCOH or SiCNH dielectrics and structures including the same
G. Dubois, S.M. Gates, A. Grill, V.Y. Lee, R.D. Miller, S. Nguyen, V. Patel
US Patent App. 11/481,019


2005

SiCOH dielectric material with improved toughness and improved Si-C bonding, semiconductor device containing the same, and method to make the same
D C Edelstein, S M Gates, A Grill, M Lane, Q Lin, R D Miller, D A Neumayer, S V Nguyen
US Patent App. 20,060/165,891



2004


Reflective Electrophoretic Display with Stacked Color Cells
J G Gordon II, M W. Hart, A C Lowe, S A Swanson

Structure for and method of fabricating a high-speed CMOS-compatible Ge-on-insulator photodetector
J O Chu, G K Dehlinger, A Grill, S J Koester, Q Ouyang, J D Schaub
US Patent App. 20,050/184,354


Enhanced T-gate structure for modulation doped field effect transistors
D Singh, K L Saenger, V V Patel, A Grill, S J Koester
US Patent 6,740,535

Electronic structures with reduced capacitance
S M C Gates, A Grill, others
US Patent 6,737,727

Stabilization of fluorine-containing low-k dielectrics in a metal/insulator wiring structure by ultraviolet irradiation
K Babich, A Callegari, S A Cohen, A Grill, C V Jahnes, V V Patel, S Purushothaman, K L Saenger, others
US Patent 6,759,321



Transferable device-containing layer for silicon-on-insulator applications
J O Chu, A Grill, D A Herman Jr, K L Saenger, others
US Patent 6,774,010



2003




2002

Feram cell with internal oxygen source and method of oxygen release
C T Black, C Cabral Jr, A Grill, D A Neumayer, W D Pricer, K L Saenger, T M C Shaw, others
US Patent 6,388,285

Multilevel interconnect structure containing air gaps and method for making
Alfred Grill, Jeffrey Hedrick, Christopher Jahnes, Satyanarayana Nitta, Kevin Petrarca, Sampath Purushothaman, Katherine Saenger, others

Tunable and removable plasma deposited antireflective coatings
K E Babich, A C Callegari, J Fontaine, A Grill, C V Jahnes, V V Patel
US Patent 6,428,894



Dual damascene processing for semiconductor chip interconnects
A Grill, J P Hummel, C V Jahnes, V V Patel, K L Saenger
US Patent 6,448,176

Hydrogenated oxidized silicon carbon material
A Grill, C V Jahnes, V V Patel, L C Perraud
US Patent 6,497,963



2001

Flip feram cell and method to form same
J W Adkisson, C T Black, A Grill, R W Mann, D A Neumayer, W D Pricer, K L Saenger, T M C Shaw
US Patent 6,333,202

Method and materials for through-mask electroplating and selective base removal
P C Andricacos, C Cabral Jr, R Carruthers, A Grill, K L Saenger
US Patent 6,188,120

Structure and fabrication method for non-planar memory elements
R E Acosta, J H Comfort, A Grill, D E Kotecki, K L Saenger
US Patent 6,242,321

Method and material for integration of fuorine-containing low-k dielectrics
A Grill, C V Jahnes, V V Patel, K L Saenger
US Patent 6,265,779


Multiphase low dielectric constant material
A Grill, V V Patel, S M C Gates
US Patent 6,312,793


2000

Isolated sidewall capacitor
K L Saenger, J H Comfort, A Grill, D E Kotecki
US Patent 6,027,966

Stabilization of low-k carbon-based dielectrics
A Grill, C V Jahnes, V V Patel, K L Saenger
US Patent 6,030,904



1999




1998

Sidewall capacitor with L-shaped dielectric
K L Saenger, J H Comfort, A Grill, D E Kotecki
US Patent 5,712,759

Plating of noble metal electrodes for DRAM and FRAM
P C Andricacos, J H Comfort, A Grill, D E Kotecki, V V Patel, K L Saenger, A G Schrott
US Patent 5,789,320


1997

Prebent ceramic suspension
A Grill, M A Moser, V V Patel, C D Snyder, C E Yeack-Scranton, others
US Patent 5,663,854




Diamond-like carbon for use in VLSI and ULSI interconnect systems
S A Cohen, D C Edelstein, A Grill, J R Paraszczak, V V Patel
US Patent 5,674,355


1996

Magnetic head slider and method for making same
A Grill, C T Horng, B S Meyerson, V V Patel, M A Russak, H C Chang, M Chen, R O Schwenker
EP Patent 0,493,902

TaSiN oxygen diffusion barrier in multilayer structures
P D Agnello, C Cabral Jr, A Grill, C V Jahnes, T J Licata, R A Roy
US Patent 5,576,579


1995

Storage capacitors using high dielectric constant materials
D B Beach, A Grill, C J Smart
US Patent 5,461,536

Diamond-like carbon write-read optical storage memory
M J Brady, B E Braren, R J Gambino, A Grill, V V Patel
US Patent 5,440,507



1994

Amorphous write-read optical storage memory
M J Brady, B E Braren, R J Gambino, A Grill, V V Patel
US Patent 5,294,518

Method and apparatus for filing high aspect patterns with metal
H J Grabarz, A Grill, W M Holber, J S Logan, J T C Yeh
US Patent 5,302,266


1993

Erosion/corrosion resistant diaphragm
N Bakhru, A Grill, G S Hopper, E Marotta, B S Meyerson, V V Patel
US Patent 5,241,131


1992

High area capacitor formation using material dependent etching
G S Oehrlein, V V Patel, A Grill, R T Hodgson, G W Rubloff
US Patent 5,155,657

Magnetic head slider having a protective coating thereon
A Grill, C T Horng, B S Meyerson, V V Patel, M A Russak
US Patent 5,159,508


1991

Copper device and use thereof with semiconductor devices
J Acocella, N Bakhru, A Grill, E Marotta, B S Meyerson, V V Patel
US Patent 5,031,029


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Projects and Groups