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Research Areas
Additional Information
Background
Chemically Amplified Resists (CAR)
- QCM/Reflectance Analysis of Dissolution Kinetics
- Kinetic model for resist dissolution
- Teas Solubility Parameter Map
Current Projects
EUV Materials
E-Beam Materials
Directed Self-Assembly
Exploratory
- DNA Origami
- Nanoprobe
Project Name
Lithography Materials
There should probably be a link here to the EUV lithography web page.
This is a place holder for the new EUV Materials web page