R. Clauberg
Vakuum-Technik
We report on the first voltage measurements of signals with rise times below 20 ps by photoemission sampling based on the single-photon process. The high time and voltage resolution together with the potential of a submicrometre spatial resolution enables testing of very high-speed VLSI circuits by this newly developed method. © 1987, The Institution of Electrical Engineers. All rights reserved.
R. Clauberg
Vakuum-Technik
R. Clauberg, A. Blacha, et al.
Advances in Semiconductors and Semiconductor Structures 1987
H. Beha, H.K. Seitz, et al.
Microelectronic Engineering
P. Buchmann, M. Benedict, et al.
LEOS 1990