Erik Loscalzo, Martin Cochet, et al.
VLSI Technology and Circuits 2024
An integrated voltage regulator (IVR) is presented that uses custom fabricated thin-film magnetic power inductors. The inductors are fabricated on a silicon interposer and integrated with a multi-phase buck converter IC by 2.5D chip stacking. Several inductor design variations have been fabricated and tested. The best performance has been achieved with a set of eight coupled inductors that each occupies 0.245 mm2 and provides 12.5 nH with 270 mΩ DC. With early inductor prototypes, the IVR efficiency for a 1.8 V:1.0 V conversion ratio peaks at 71% with FEOL current density of 10.8 A/mm 2 and inductor current density of 1.53 A/mm2. At maximum load current, 69% conversion efficiency and 1.8 V:1.2 V conversion ratio the FEOL current density reaches 22.6 A/mm2 and inductor current density reaches 3.21 A/mm2. © 1966-2012 IEEE.
Erik Loscalzo, Martin Cochet, et al.
VLSI Technology and Circuits 2024
A. Annunziata, M.C. Gaidis, et al.
IEDM 2011
Xiao Sun, Naigang Wang, et al.
NeurIPS 2020
Andrea Fasoli, Chia-Yu Chen, et al.
INTERSPEECH 2021