Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
Yun Mao, Hani Jamjoom, et al.
CoNEXT 2006
Zohar Feldman, Avishai Mandelbaum
WSC 2010
Michael C. McCord, Violetta Cavalli-Sforza
ACL 2007