Donald Samuels, Ian Stobert
SPIE Photomask Technology + EUV Lithography 2007
Considerable difficulties have been encountered in the direct application of variational methods to control systems optimization because two-point boundary problems are involved which cannot normally be solved in real time. In this paper a method is described in which, by the use of heuristic computation techniques, this limitation is overcome. © 1971 Taylor & Francis Group, LLC.
Donald Samuels, Ian Stobert
SPIE Photomask Technology + EUV Lithography 2007
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