P.C. Pattnaik, D.M. Newns
Physical Review B
A novel micromachined silicon displacement sensor based on the conduction of heat between two surfaces through the ambient air is described. A displacement resolution of less than 1 nm and a dynamic range of more than 100 νm was achieved in a 10 kHz bandwidth. To minimize drift, the sensors are operated in pairs, using a differential measurement configuration. The power consumption of these devices is on the order of 10 mW per sensor, and the measured time response is described by a simple exponential with a time constant of approximately 100 νs. © 2005 IOP Publishing Ltd.
P.C. Pattnaik, D.M. Newns
Physical Review B
R. Ghez, J.S. Lew
Journal of Crystal Growth
Ranulfo Allen, John Baglin, et al.
J. Photopolym. Sci. Tech.
P. Alnot, D.J. Auerbach, et al.
Surface Science