Zelek S. Herman, Robert F. Kirchner, et al.
Inorganic Chemistry
A novel micromachined silicon displacement sensor based on the conduction of heat between two surfaces through the ambient air is described. A displacement resolution of less than 1 nm and a dynamic range of more than 100 νm was achieved in a 10 kHz bandwidth. To minimize drift, the sensors are operated in pairs, using a differential measurement configuration. The power consumption of these devices is on the order of 10 mW per sensor, and the measured time response is described by a simple exponential with a time constant of approximately 100 νs. © 2005 IOP Publishing Ltd.
Zelek S. Herman, Robert F. Kirchner, et al.
Inorganic Chemistry
David B. Mitzi
Journal of Materials Chemistry
Ellen J. Yoffa, David Adler
Physical Review B
Sharee J. McNab, Richard J. Blaikie
Materials Research Society Symposium - Proceedings