Sub-40nm V-groove MOSFETs
J. Appenzeller, R. Martel, et al.
DRC 2001
Adsorption of B induces a (3 × 3) R30°reconstruction on Si(111). By combining scanning tunneling microscope topographs and spectra with first-principles calculations we are able to follow the different stages of B incorporation in the Si surface and the corresponding changes to the surface electronic states. We find that the thermodynamically stable configuration consists of a B substitutional atom directly below a Si adatom at a T4 site. The stability of this configuration is due to the relief of subsurface strain by the short B-Si bonds and the passivation of the surface obtained through charge transfer from the Si adatom to the substitutional B. © 1989 The American Physical Society.
J. Appenzeller, R. Martel, et al.
DRC 2001
N.J. DiNardo, J.E. Demuth, et al.
JVSTA
Ph. Avouris, M.M.T. Loy, et al.
Chemical Physics Letters
In-Whan Lyo, Ph. Avouris
The Journal of Chemical Physics