Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
We report detection of forces as small as 1.4 × 10-18 N in a 1 Hz bandwidth using ultrathin silicon cantilevers operating at liquid helium temperatures. Cantilever fabrication, the importance of surface cleanliness and various measurement issues are discussed. Tip-surface interactions are described, including the detection of single electron trapping-untrapping events. Applications of attonewton force detection for single spin magnetic resonance force microscopy (MRFM) and ultrasensitive magnetometry are discussed. © Springer-Verlag 2001.
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
T.N. Morgan
Semiconductor Science and Technology
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
J.H. Stathis, R. Bolam, et al.
INFOS 2005