Conference paper
Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
A simple method is shown for computing the Airy stress function for two-dimensional problems. The method is applied to a simple mechanics example and to large computer-generated atomic models whose properties are independent of some coordinate z. The method has recently proved useful for analyzing topological defects in computer-generated models of amorphous solids. © 1981.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009
A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990
Igor Devetak, Andreas Winter
ISIT 2003