PaperCorrections to proximity effects in electron beam lithography. II. ImplementationMihir ParikhJournal of Applied Physics
PaperA tunneling spectroscopy study of molecular degradation due to electron irradiationPaul K. Hansma, Mihir ParikhScience
PaperCalculation of changes in pattern dimensions to compensate for proximity effects in electron lithographyMihir ParikhJournal of Applied Physics
PaperCorrections to proximity effects in electron beam lithography. I. TheoryMihir ParikhJournal of Applied Physics