Kenneth R. Carter, Robert D. Miller, et al.
Macromolecules
At ambient temperature, atomic hydrogen from a remote plasma produces large numbers of interface states which are not due to silicon dangling bonds. The release of atomic hydrogen by hot electrons or by radiation during device operation will inevitably lead to device degradation. © 1995.
Kenneth R. Carter, Robert D. Miller, et al.
Macromolecules
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009