Conference paper
Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
We show that if: GHis a bounded-to-1 factor map from an irreducible shift of finite type Gwith period pG to a shift of finite type Hwith period pH, then there is a factor map that is (pG/pH)-to-1 almost everywhere. Moreover, if is right closing, then may be taken to be right closing also. © 1990, Cambridge University Press. All rights reserved.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
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