Juliann Opitz, Robert D. Allen, et al.
Microlithography 1998
Juliann Opitz, Robert D. Allen, et al.
Microlithography 1998
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
Sankar Basu
Journal of the Franklin Institute
M. Tismenetsky
International Journal of Computer Mathematics