S.M. Sadjadi, S. Chen, et al.
TAPIA 2009
No abstract available.
S.M. Sadjadi, S. Chen, et al.
TAPIA 2009
Yao Qi, Raja Das, et al.
ISSTA 2009
Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
B. Wagle
EJOR