William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
It is shown that electron paramagnetic resonance spectroscopy provides an accurate method for measuring the preferential orientation of axial crystallites in ceramics. Since the physical properties of ceramic materials are correlated with the degree of this orientation, EPR can be a convenient and useful tool for the characterization of ceramics. Copyright © 1981, Wiley Blackwell. All rights reserved
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
M. Hargrove, S.W. Crowder, et al.
IEDM 1998
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering