Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The use of nuclear magnetic resonance (NMR) spectrometry for the structural studies of chemically-induced discotic liquid crystals was discussed. The synthesis of the phase inductor with two deutrons in the phenyl ring was accomplished in a single step using the catalytic exchange procedure. The reaction was quenched by the addition of 5 ml D2O, the organic layer was left to evaporate and 0.38 g of the product was obtained. The degree of deuteriation was found by proton NMR to be approximately 70%.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
Arvind Kumar, Jeffrey J. Welser, et al.
MRS Spring 2000
S. Cohen, J.C. Liu, et al.
MRS Spring Meeting 1999