Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
No abstract available.
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009
Xikun Hu, Wenlin Liu, et al.
IEEE J-STARS
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008