Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
One- and two-phonon Raman-scattering efficiencies are computed for the hcp phase of solid helium, following a theoretical model used previously for neon and argon. Attention is given to the dependence of the efficiencies on photon polarizations, photon energy loss, and crystal density. Two-phonon efficiencies are also computed for the bcc phase, and critical points are identified. © 1971 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
Frank Stem
C R C Critical Reviews in Solid State Sciences