J.R. Thompson, Yang Ren Sun, et al.
Physica A: Statistical Mechanics and its Applications
No abstract available.
J.R. Thompson, Yang Ren Sun, et al.
Physica A: Statistical Mechanics and its Applications
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010