Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
This paper is concerned with stability and accuracy of families of linear k-step formulas depending on parameters, with particular emphasis on the numerical solution of stiff ordinary differential equations. An upper bound, p = k, is derived for the order of accuracy of A∞-stable formulas. Three criteria are given for A0-stability. It is shown that (1) for p = k, k arbitrary, A∞-stability implies certain necessary conditions for A0-stability and for strict stability (meaning that the extraneous roots of ρ(ζ) satisfy |ζ| < 1); (2) for p = k = 2, 3, 4, and 5, A∞-stability (for k = 5 together with another constraint) implies strict stability; and (3) for certain one-parameter classes of formulas with p = k = 3, 4, and/or 5, A∞-stability implies A0-stability. © 1975, ACM. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Minkyong Kim, Zhen Liu, et al.
INFOCOM 2008
N.K. Ratha, A.K. Jain, et al.
Workshop CAMP 2000
Oliver Bodemer
IBM J. Res. Dev