Conference paper
Absorption and Scattering in Nonlinear Optical Polymeric Systems
A. Skumanich, M. Jurich, et al.
OTF 1993
A flexible imprinter can be used to accommodate substrate or template roughness in nanoimprint lithography. The contact mechanics of a multi-layer imprinter incorporating bending and local deformation is described. With the right combination of dimensions, moduli, and viscosity, the imprinter can transfer a pattern evenly to a non-flat substrate. These concepts have been used to pattern magnetic media for high density information storage. © 2005 Springer Science+Business Media. Inc.
A. Skumanich, M. Jurich, et al.
OTF 1993
D. Arvanitis, U. Döbler, et al.
Surface Science
Natallia Shalkevich, Werner Escher, et al.
Langmuir
Sharee J. McNab, Richard J. Blaikie
Materials Research Society Symposium - Proceedings