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This method, which combines semiconductor manufacturing technology with molecular biology, has been used to build DNA and RNA arrays at densities as high as 10 6 sites/cm 2.
R. Sooriyakumaran, D. Fenzel-Alexander, et al.
Microlithography 2000
Jeff W. Labadie, K.R. Carter, et al.
Polymer Bulletin
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Microlithography 1995
G.M. Wallraff, J.L. Hedrick, et al.
ACS Spring 1991