T.C. Reiley, T.R. Albrecht, et al.
INVMTC 1998
No abstract available.
T.C. Reiley, T.R. Albrecht, et al.
INVMTC 1998
L.-S. Fan, L.H. Lane, et al.
MEMS 1993
R.H. Wang, V. Raman, et al.
American Society of Mechanical Engineers, Tribology Division, TRIB
T.C. Reiley, L.-S. Fan, et al.
Microelectronic Engineering