Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The reaction of a clean Fe{001} surface with oxygen gas was monitored with low-energy-electron diffraction (LEED) and Auger-electron spectroscopy. The formation of an Fe{001} 1 × 1-O structure at full monolayer coverage was confirmed, whereas the Fe{001} c(2×2)-O structure reported by three other groups could not be reproduced. A LEED structure analysis of the Fe{001} 1 × 1-O structure revealed that the oxygen atoms are located deep inside the fourfold symmetrical hollows of the substrate surface, with the first substrate interlayer spacing 7.5% expanded with respect to the bulk. The effective hard-sphere radius of the oxygen atom in this structure is 0.78. The results of the structure analysis are consistent with the results of photoemission experiments reported by others. © 1977 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Q.R. Huang, Ho-Cheol Kim, et al.
Macromolecules
Kenneth R. Carter, Robert D. Miller, et al.
Macromolecules
Mitsuru Ueda, Hideharu Mori, et al.
Journal of Polymer Science Part A: Polymer Chemistry