R.J. Gambino, N.R. Stemple, et al.
Journal of Physics and Chemistry of Solids
Paper
Effect of thin-film imaging on line edge roughness transfer to underlayers during etch processes
Abstract
No abstract available.
Related
John G. Long, Peter C. Searson, et al.
JES
J.K. Gimzewski, T.A. Jung, et al.
Surface Science
D.D. Awschalom, J.-M. Halbout
Journal of Magnetism and Magnetic Materials