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Physica E: Low-Dimensional Systems and Nanostructures
Thin dielectric films produced by electron bombardment of epichlorohydrin vapor were investigated with regard to their electrical characteristics and the effects of various parameters involved in their formation. The films showed non-ohmic conduction upon application of large electric fields. The nature of this conduction is considered and it is concluded that tunneling and electron emission are both involved, with the latter predominating at room temperature. © 1968.
U. Wieser, U. Kunze, et al.
Physica E: Low-Dimensional Systems and Nanostructures
T.N. Morgan
Semiconductor Science and Technology
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
P.C. Pattnaik, D.M. Newns
Physical Review B