Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We have measured the energy distributions of electrons field emitted from tungsten carbide, HfC〈100〉, and ZrC〈100〉 tips, and tungsten field emitters with diamondlike carbon coatings. Multiple-peaked energy distributions were observed from instability induced emission sites on the carbide tips. Energy distributions of electrons field emitted from the diamondlike carbon coated tungsten tips were broader than those from metal tips. They also showed a shift towards lower energies with increases in the emission current. © 1996 American Vacuum Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
A.B. McLean, R.H. Williams
Journal of Physics C: Solid State Physics
Thomas H. Baum, Carl E. Larson, et al.
Journal of Organometallic Chemistry