Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The paper by J. McComb and S. Schmidt (1988) described the contents and performance features of the Engineering and Scientific Subroutine Library (ESSL) Release 2. In this technical note, we describe several new features in ESSL Release 3 and discuss some of the techniques that were used to optimize vector and parallel performance.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
G. Ramalingam
Theoretical Computer Science
Raghu Krishnapuram, Krishna Kummamuru
IFSA 2003
Fan Zhang, Junwei Cao, et al.
IEEE TETC