P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
First-principles ground-state total-energy calculations show that tetragonal crystals generally have two structures at which the energy is a minimum, which are appropriately called tetragonal phases in equilibrium. The calculations also show that a small isotropic two-dimensional (epitaxial) strain in the basal plane of a tetragonal phase produces a first-order phase transition to another tetragonal phase. By defining and calculating a special free energy for the states produced by epitaxial strain, the stability limits of each phase and the occurrence of a first-order phase transition between them are clearly demonstrated. Epitaxially strained states and the epitaxial free energy are calculated for vanadium. The epitaxial free energy as a function of the epitaxial stress for these strained states is shown to be similar to free-energy curves calculated for other first-order phase transitions which have analytic descriptions.
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
A. Reisman, M. Berkenblit, et al.
JES
Douglass S. Kalika, David W. Giles, et al.
Journal of Rheology