Robert H. Dennard, Matthew R. Wordeman
Physica B+C
Paper
Evolution of the MOSFET Dynamic RAM—A Personal View
Abstract
The early conceptual stages and key elements in the development of the one-device MOSFET dynamic RAM are reviewed from the personal perspective of the author. Future miniaturization to the level of 1/4μm channel length and minimum lithography dimension is projected. © 1984 IEEE
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