Oliver C. Wells
Review of Scientific Instruments
Earlier studies of photoresist by the low-loss electron method are extended in three ways. First, more work has been done on the imaging of fine details on the surface of a poorly conducting, low-density specimen. Second, the method has been applied to show the surface of a self-supported membrane. Finally, it has been found that the low-loss image (especially when used at low magnifications) can show the roughness of a flat surface.
Oliver C. Wells
Review of Scientific Instruments
John A. Allgair, Victor V. Boksha, et al.
SPIE Advanced Microelectronic Manufacturing 2003
Oliver C. Wells
Applied Physics Letters
Oliver C. Wells, Maurice McGlashan-Powell, et al.
Scanning