Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
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The reaction of potassium hydride in tetrahydrofuran with simple and hindered trialkylboranes proceeds readily at 25°C (<0.5 h) with the formation of the corresponding trialkylborohydrides. Even some highly hindered trialkylboranes react smoothly under these conditions. This reaction provides a convenient synthesis in high yields of such hindered and highly hindered potassium trialkylborohydride under very mild reaction conditions. © 1978.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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