Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Epitaxial films of brittle materials like the garnets often fracture under the influence of tensile (misfit) stresses. A consideration of the conditions which lead to fracture indicates that cracks will not propagate in a film which is strongly bonded to its substrate unless the film thickness is greater than the Griffith crack length. Predictions based on this condition are in good agreement with all experimental determinations of the circumstances which lead to cracks. © 1972.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Shaoning Yao, Wei-Tsu Tseng, et al.
ADMETA 2011
H.D. Dulman, R.H. Pantell, et al.
Physical Review B
Hiroshi Ito, Reinhold Schwalm
JES