Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
No abstract available.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Julien Autebert, Aditya Kashyap, et al.
Langmuir
Xikun Hu, Wenlin Liu, et al.
IEEE J-STARS
Ranulfo Allen, John Baglin, et al.
J. Photopolym. Sci. Tech.