PaperSome methods for producing straight achromatic white-light fringes of variable contrast and constant average irradianceDouglas S. GoodmanApplied Optics
Conference paperScanning excimer ablation systemDouglas S. Goodman, Thomas Ainsworth, et al.LEOS 1992
Conference paperBench evaluation of lithographic lenses from measurements of the point spread functionNorman Bobroff, Petra Fadi, et al.Proceedings of SPIE 1989