Conference paper
Characterization of plated Cu thin film microstructures
L. Gignac, K.P. Rodbell, et al.
MRS Spring Meeting 1999
No abstract available.
L. Gignac, K.P. Rodbell, et al.
MRS Spring Meeting 1999
C.-K. Hu, D. Canaperi, et al.
Thin Solid Films
L. Gignac, K.P. Rodbell, et al.
MRS Spring Meeting 1999
S. Bangsaruntip, G.M. Cohen, et al.
IEDM 2009