Ming L. Yu, D.J. Vitkavage, et al.
Journal of Applied Physics
No abstract available.
Ming L. Yu, D.J. Vitkavage, et al.
Journal of Applied Physics
M.L. Yu, D.J. Vitkavage, et al.
JVSTA
G.L. Patton, J.H. Comfort, et al.
VLSI Technology 1990
Subramanian S. Iyer, G.L. Patton, et al.
Thin Solid Films