Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
A new polymer multilayer fabrication method by the use of thin films of lamellar polystyrene-block-poly(methyl methacrylate was investigated. The thin-film striped patterns of parallel and perpendicular polystyrene-block- poly(methyl methacrylate) (PS-b-PMMA) lamellar to compare the time evolution of ε were prepared. The thin films of cylindrical and lamellar materials were spin casted and annealed for a time range of 5-4000 minutes. The perpendicular orientation of the lamellar domains were surface pretreated with a random copolymer brush prior to diblock copolymer applications. The measurements show that the topological differences between the cylindrical and lamellar morphologies influence coarsening kinetics.
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
L.K. Wang, A. Acovic, et al.
MRS Spring Meeting 1993
A. Ney, R. Rajaram, et al.
Journal of Magnetism and Magnetic Materials
T.N. Morgan
Semiconductor Science and Technology