M. Hargrove, S.W. Crowder, et al.
IEDM 1998
Measurement and calculation of the inductance of a nonstraight conductor close to ground return plane are considered. An equivalent circuit model solution is given, and the results are compared to measurements for a corner-type geometry. Much larger changes in inductance as a function of frequency have been observed for the corner-type geometry than for the equivalent straight-conductor geometry. The circuit model can be used to predict the inductance for other configurations. Copyright © 1975 by The Institute of Electrical and Electronics Engineers, Inc.
M. Hargrove, S.W. Crowder, et al.
IEDM 1998
T.N. Morgan
Semiconductor Science and Technology
R.W. Gammon, E. Courtens, et al.
Physical Review B
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films