Andreas C. Cangellaris, Karen M. Coperich, et al.
EMC 2001
Amorphous hydrogenated carbon (a-C) exhibits outstanding properties such as high hardness, low mechanical wear and friction, high thermal conductivity, etc. These properties are irreversibly altered above 400 °C. Doping the a-C films with nitrogen revealed the possibility to continuously tune properties such as internal stress, hardness, electrical conductivity and surface energy. X-ray photoelectron spectroscopy has been used to analyze the chemical and structural modifications caused by the introduction of nitrogen into the films. An increased onset temperature of the thermal C-H bond decomposition in a-C films up to 600 °C (in vacuum) is observed. Hardness measurements on N-doped samples show an increase in thermal stability of the films, however, without ever reaching the hardness values obtained from the undoped a-C film. © 1995.
Andreas C. Cangellaris, Karen M. Coperich, et al.
EMC 2001
L.K. Wang, A. Acovic, et al.
MRS Spring Meeting 1993
R.J. Gambino, N.R. Stemple, et al.
Journal of Physics and Chemistry of Solids
Kigook Song, Robert D. Miller, et al.
Macromolecules