A.C. Luntz, Harold F. Winters
The Journal of Chemical Physics
A simple phenomenological theory of alloy sputtering is developed which suggests that in some instances the depth resolution of depth profiling measurements is limited by the time it takes to create a layer of altered chemical composition at the surface.
A.C. Luntz, Harold F. Winters
The Journal of Chemical Physics
F. Fracassi, J.W. Coburn
Journal of Applied Physics
J.W. Coburn
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
H.F. Winters, J.W. Coburn
Applied Physics Letters