Conference paper
Direct phase measurements in phase-shift masks
A.P. Ghosh, D.B. Dove
Microlithography 1992
An infrared imaging system has been used to measure the thermal response of the print head electrodes during resistive ribbon thermal transfer printing. This has proved to be an effective method for fast, non-contact, high spatial resolution temperature measurements, providing valuable information on the thermal stress upon the head materials and on the amount of energy flowing into the head during printing.
A.P. Ghosh, D.B. Dove
Microlithography 1992
D.J. Robbins, C. Falcony, et al.
IEEE Electron Device Letters
D.B. Dove, Alan E. Rosenbluth
EURODISPLAY 1997
L. Samuel, D.B. Dove, et al.
Journal of Applied Physics