I. Morgenstern, K.A. Müller, et al.
Physica B: Physics of Condensed Matter
Rapid thermal annealing has been used for fabrication of YBaCuO thin films from Cu/BaO/Y2O3 layered structures. The films were deposited on Si substrates by electron-beam evaporation. The interdiffusion at the film/substrate interface has been investigated using Auger depth profiling. With a metal barrier layer, the film showed the superconducting transition between 74-85 K. At anneal temperature above 980°C, Si was found to diffuse throughout the film and degrade the superconductivity of the films. © 1989.
I. Morgenstern, K.A. Müller, et al.
Physica B: Physics of Condensed Matter
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
Douglass S. Kalika, David W. Giles, et al.
Journal of Rheology
S. Cohen, J.C. Liu, et al.
MRS Spring Meeting 1999