PaperBoron, phosphorus, and arsenic diffusion in tisi2P. Gas, V.R. Deline, et al.Journal of Applied Physics
PaperAnnealing properties of ion-implanted p-n junctions in siliconAlwin E. Michel, F. Fang, et al.Journal of Applied Physics
PaperAnomalous diffusion of boron implanted into silicon along the [100] directionAlwin E. Michel, M. Numan, et al.Applied Physics Letters
PaperTransient diffusion of boron implanted in SI along random and channeling directionsW.K. Chu, M. Numan, et al.Nuclear Inst. and Methods in Physics Research, B