William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Hierarchical nanostructures are generated on substrates by combining a top-down ion beam lithography with a bottom-up self-assembly of block copolymers. The ion beam lithography images micron sized patterns of block copolymer thin films which contain nanometer sized microdomains. This approach provides a simple route to fabricate structures containing two different length scales, i.e. micrometers and nanometers, which may find a variety of potential applications in nanoscience and technology. © 2009 CPST.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
P.C. Pattnaik, D.M. Newns
Physical Review B
Ellen J. Yoffa, David Adler
Physical Review B
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989